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Micromechanics and MEMS classic and seminal papers to 1990

Trimmer, William S

Micromechanics and MEMS classic and seminal papers to 1990 - New York IEEE 1997 - xv,704 p. Illustration

ISBN: 0780310853

Subjects--Topical Terms:
ACTUATORS
ELECTRONIC SCIENCE
ELECTRONICS
MEMS
MICRO ECONOMIC

Universal Decimal Class. No.: 621.382 / MIC

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