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Semiconductor micromachining, Vol.2 techniques and industrial applications

Campbell, S.A

Semiconductor micromachining, Vol.2 techniques and industrial applications - Chichester John Wiley 1998 - xii,389 p. Illustration

ISBN: 0471966827

Subjects--Topical Terms:
CHEMISTRY
ELECTROCHEMISTRY
PHYSICAL CHEMISTRY
SEMICONDUCTORS

Dewey Class. No.: 541.377 / SEM

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