Trimmer, William S <br/><br/>
Micromechanics and MEMS  classic and seminal papers to 1990 

 - New York  IEEE  1997 
 - xv,704 p.  Illustration 
<br/><br/><label>ISBN: </label>0780310853 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ACTUATORS<br/>ELECTRONIC SCIENCE<br/>ELECTRONICS<br/>MEMS<br/>MICRO ECONOMIC
<br/><br/><label>Universal Decimal Class. No.: </label>621.382  / MIC