TY  - GEN
AU  - Trimmer, William S
TI  - Micromechanics and MEMS: classic and seminal papers to 1990
SN  - 0780310853
PY  - 1997///
CY  - New York
PB  - IEEE
KW  - ACTUATORS
KW  - ELECTRONIC SCIENCE
KW  - ELECTRONICS
KW  - MEMS
KW  - MICRO ECONOMIC
ER  -