Roosmalen, A.J. Van <br/><br/>
Dry etching for VLSI 

 - New York  Plenum Press  1991 
 - xvii,237 p.  Illustration 
<br/><br/><label>ISBN: </label>0306438356 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONIC DEVICES<br/>ELECTRONICS
<br/><br/><label>Universal Decimal Class. No.: </label>621.392  / ROO