TY  - GEN
AU  - Roosmalen, A.J. Van
AU  - Brader, S.J.H.
AU  - Brader,S.J.H
TI  - Dry etching for VLSI
SN  - 0306438356
PY  - 1991///
CY  - New York
PB  - Plenum Press
KW  - ELECTRONIC DEVICES
KW  - ELECTRONICS
ER  -