TY  - GEN
AU  - Bouchoule, Andre
TI  - Dusty plasmas: phycs, chemistry and technological impacts in plasma processing
SN  - 0471973866
PY  - 1999///
CY  - Chichester
PB  - John Wiley
KW  - PLASMA PHYSICS
KW  - VAPOR DEPOSITION
ER  -