TY  - GEN
AU  - Liu, Aiqun
AU  - Lu, Chun
AU  - Reddy, Chilla Damodara
AU  - Wu, Jiuhui
TI  - Mems technology and devices
SN  - 109812709606
U1  - 621.382 
PY  - 2007///
CY  - Singapore
PB  - Pan Stanford
KW  - ELECTRONIC DEVICES
KW  - ELECTRONICS
KW  - MECHANICAL ENGINEERING
KW  - MEMS TECHNOLOGY
ER  -