TY  - GEN
AU  - Tseng, Ampere A
TI  - Nanofabrication: fundamentals and applications
SN  - 9812705422
U1  - 620.3 
PY  - 2008///
CY  - New Jersey
PB  - World Scientific
KW  - ELECTRONICS
KW  - MECHANICAL ENGINEERING
KW  - NANO TECHNOLOGY
KW  - NANOFABRICATION
ER  -