TY  - GEN
AU  - Zhou, Guangya
AU  - Lee, Chengkuo
TI  - Optical MEMS, nanophotonics, and their applications
T2  - Series in Optics and Optoelectronics
SN  - 9781498741330
U1  - 621.36 
PY  - 2017///
CY  - Boca raton
PB  - CRC Press
KW  - NANOPHOTONICS
KW  - OPTICAL MEMS
ER  -