Campbell, S.A <br/><br/>
Semiconductor micromachining, Vol.2  techniques and industrial applications 

 - Chichester  John Wiley  1998 
 - xii,389 p.  Illustration 
<br/><br/><label>ISBN: </label>0471966827 
<br/><br/><label>Subjects--Topical Terms: </label><br/>CHEMISTRY<br/>ELECTROCHEMISTRY<br/>PHYSICAL CHEMISTRY<br/>SEMICONDUCTORS
<br/><br/><label>Dewey Class. No.: </label>541.377  / SEM