TY  - GEN
AU  - Campbell, S.A
AU  - Lewerenz, H.J
TI  - Semiconductor micromachining, Vol.2: techniques and industrial applications
SN  - 0471966827
U1  - 541.377 
PY  - 1998///
CY  - Chichester
PB  - John Wiley
KW  - CHEMISTRY
KW  - ELECTROCHEMISTRY
KW  - PHYSICAL CHEMISTRY
KW  - SEMICONDUCTORS
ER  -