Gupta, Dinesh C <br/><br/>
Gate dielectric integrity  material, process and tool qualification 

 - West Conshohocken  ASTM Pub. 
 - xi,169 p. 
<br/><br/><label>ISBN: </label>0803126158 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRICAL ENGINEERING
<br/><br/><label>Universal Decimal Class. No.: </label>621.38  / GAT