| 000 | 00671 a2200241 4500 | ||
|---|---|---|---|
| 003 | ISURu | ||
| 005 | 20240721182743.0 | ||
| 008 | 201106b ce ||||| |||| 00| 0 sin d | ||
| 020 | _a0780310853 | ||
| 041 | _aeng | ||
| 080 |
_a621.382 _bMIC |
||
| 100 |
_aTrimmer, William S _eed _919708 |
||
| 245 |
_aMicromechanics and MEMS _bclassic and seminal papers to 1990 |
||
| 260 |
_aNew York _bIEEE _c1997 _g1996 |
||
| 300 |
_axv,704 p. _bill. |
||
| 650 | 0 |
_aACTUATORS _9163324 |
|
| 650 | 0 |
_aELECTRONIC SCIENCE _91925 |
|
| 650 | 0 |
_aELECTRONICS _970813 |
|
| 650 | 0 |
_aMEMS _9148080 |
|
| 650 | 0 |
_aMICRO ECONOMIC _94251 |
|
| 942 |
_cL _2ddc |
||
| 945 |
_dMain Library ADMIN _c26318 |
||
| 999 |
_c108960 _d136734 |
||