000 00600 a2200229 4500
003 ISURu
005 20240721204846.0
020 _a9812705422
041 _aeng
082 _a620.3
_bNAN
090 _d138858
100 _aTseng, Ampere A
_eed
_9151533
245 _aNanofabrication
_bfundamentals and applications
260 _aNew Jersey
_bWorld Scientific
_c2008
_g2008
300 _aviii, 574 p.
650 0 _aELECTRONICS
_970813
650 _aMECHANICAL ENGINEERING
650 _aNANO TECHNOLOGY
650 0 _aNANOFABRICATION
_9151534
942 _cR
999 _c110330
_d138858
945 _dMain Library ADMIN
_c26318