000 00606 a2200217 4500
003 ISURu
008 190701b ce ||||| |||| 00| 0 eng d
020 _a9781498741330
041 _aeng
082 _a621.36
_bOPT
100 _aZhou, Guangya
_eed
_9264252
245 _aOptical MEMS, nanophotonics, and their applications
260 _aBoca raton
_bCRC Press
_c2017
_g2017
300 _axiii,432 p.
490 _aSeries in Optics and Optoelectronics
650 _aNANOPHOTONICS
650 _aOPTICAL MEMS
_9264253
700 _aLee, Chengkuo
_eed
_9264254
942 _cL
_n1
_2ddc
945 _dMain Library ADMIN
_c26318
999 _c211083
_d244470