| 000 | 00660 a2200241 4500 | ||
|---|---|---|---|
| 003 | ISURu | ||
| 005 | 20240721203256.0 | ||
| 020 | _a0471966827 | ||
| 041 | _aeng | ||
| 082 |
_a541.377 _bSEM |
||
| 090 | _d36404 | ||
| 100 |
_aCampbell, S.A _eed _9111196 |
||
| 245 |
_aSemiconductor micromachining, Vol.2 _btechniques and industrial applications |
||
| 260 |
_aChichester _bJohn Wiley _c1998 _g1998 |
||
| 300 |
_axii,389 p. _bill. |
||
| 650 | _aCHEMISTRY | ||
| 650 | 0 |
_aELECTROCHEMISTRY _978139 |
|
| 650 | _aPHYSICAL CHEMISTRY | ||
| 650 | 0 |
_aSEMICONDUCTORS _995977 |
|
| 700 |
_aLewerenz, H.J _eed _9111197 |
||
| 942 | _cPR | ||
| 999 |
_c32949 _d36404 |
||
| 945 |
_dMain Library ADMIN _c26318 |
||